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Modular Deposition Technology

  • Desktop PVD system
  • Desktop PVD system
  • Desktop PVD system
  • Desktop PVD system
  • Desktop PVD system
  • Desktop PVD system
Desktop PVD systemDesktop PVD systemDesktop PVD systemDesktop PVD systemDesktop PVD systemDesktop PVD system

Desktop PVD system

  • Modular design
  • Sputter, E-beam, Thermal
  • Small Footprint
  • Flexible
  • Product description: Modular PVD system
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Modular PVD system


1.  Detachable chamber wall(functional, blank, Process gas line)

2.  Small footprint ~ 1mSize:65cm*60cm*70cm, weight: 50kg

3.  Pumping speed (5*10-6 Torr within 20 mins)

4.  4 inch substrate (rotation: 2-20rpm, Heating: 300℃, DC bias options)

5.  Multiple depsition technics: Sputter, E-beam, Thermal, Organic evaporation

6.  QCM, Glavebox and customized options.

7.  Automation control