The Oxygen Atom Beam Source OBS is a thermal gas cracker that produces an ion-free hydrogen gas beam, thus avoiding ion induced damage to the substrate.
Features:
O2 dissociation typically 80 to 98%,
depending on operation conditions
Atomic H-flux density up to 10^15/s*cm2
No high-energy particles and ions
Low power consumption
Integrated water cooling, low thermal load on other experimental equipment
Contact: Nana Zhang
Phone: 18201230727
Tel: 010-80698356
Email: Info@be-instruments.com
Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing