EBVM evaporators are designed for evaporation of low vapor pressure materials in UHV applications. They are frequently used for evaporation of refractory metals (Ta, Zr, Nb, W), as well as for high-rate evaporation of Al, semiconductors, or oxides.
Features:
Full UHV compatibility by hermetic all-metal
sealed design, low outgassing
Up to 6 pockets, hearth capacities 8 or 15 cc
Reliable translation mechanism with manual
or motorized actuation
High frequency x-y-beam defl ection system
Bakeout temperature 200°C
Easy installation with guide rod slide
Contact: Nana Zhang
Phone: 18201230727
Tel: 010-80698356
Email: Info@be-instruments.com
Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing