Language: Chinese line English

MBE E-beam Evaporator

  • Linear Multi-pocket Evaporator-EBVM
  • Linear Multi-pocket Evaporator-EBVM
Linear Multi-pocket Evaporator-EBVMLinear Multi-pocket Evaporator-EBVM

Linear Multi-pocket Evaporator-EBVM

  • Model: EBVM
  • Product description: Linear Multi-pocket Evaporator-EBVM
  • INQUIRY

EBVM evaporators are designed for evaporation of low vapor pressure materials in UHV applications. They are frequently used for evaporation of refractory metals (Ta, Zr, Nb, W), as well as for high-rate evaporation of Al, semiconductors, or oxides.


Features:

Full UHV compatibility by hermetic all-metal
sealed design, low outgassing
Up to 6 pockets, hearth capacities 8 or 15 cc
Reliable translation mechanism with manual
or motorized actuation
High frequency x-y-beam defl ection system
Bakeout temperature 200°C
Easy installation with guide rod slide
 

CONTACT US

Contact: Nana Zhang

Phone: 18201230727

Tel: 010-80698356

Email: Info@be-instruments.com

Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing