A source concept like this is used for high vapor pressure materials, which form atom clusters. Typical evaporation elements are As, Se, Sb, Te, Mg.
Features:
Port to chamber DN40CF (2.75” O.D.)
Crucible capacity: 35 cm³ or 130 cm³
Heater type: tantalum wire filament
Cooling: integrated water cooling shroud
Operating temperature: 100°C - 650°C
Maximum temperature: 750°C
Thermocouple: NiCr/NiAl (type K)
Injector tube:
Length of tube: 220 mm or 287 mm
Heater type: tantalum wire filament
Operating temperature: 200°C - 750°C
Thermocouple: W5%Re / W26%Re (type C)
Cracker:
Heater type: tantalum wire filament
Cooling: integrated water cooling shroud
Operating temperature: 300°C - 1200°C
Maximum temperature: 1300°C
Thermocouple: W5%Re / W26%Re (type C)
Cracking insert: PBN
Contact: Nana Zhang
Phone: 18201230727
Tel: 010-80698356
Email: Info@be-instruments.com
Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing