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MBE System

  • Oxide MBE system-OCTOPLUS-O 400
Oxide MBE system-OCTOPLUS-O 400

Oxide MBE system-OCTOPLUS-O 400

  • Product Model: OCTOPLUS-O 400
  • Product description: The OCTOPLUS-O 400 is a versatile and very thoroughly designed MBE system, ideally suited for oxide layer deposition. The unique dual zone design with efficient differential pumping allows depositing
  • INQUIRY

The OCTOPLUS-O 400 is a versatile and very thoroughly designed MBE system, ideally suited for oxide layer deposition. The unique dual zone design with efficient differential pumping allows depositing oxide layers in high Oxygen or Ozone partial pressure without strong degeneration of the hot sources. The OCTOPLUS-O 400 system can be easily adapted to small wafer segments as well as to 2 inch wafers. The field-proven vertical chamber design of the OCTOPLUS-O 400 plus various state-of-the-art components allow layer by layer precise MBE growth.


Specifications for the OCTOPLUS-O 400 system:

● Applications for many oxide and metal materials

● Small samples or wafer sizes up to 2"

● Load-lock and buffer chambers

● Wafer transfer system

● Standard 9 ports with option to add 3 more sources (12 ports in total)

● Differential pumping by multiple turbomolekular pumps

● In-situ characterization for RHEED, QCM, Pyrometer, etc.

● Compatible to UHV surface analysis

● Sources: effusion cells, e-beam evaporators, etc.

● Retractable sources for reloading without chamber venting

● Ozone source with or without enrichment

● Oxigen plasma source


We provide different kinds of effusion cells, valved cracker sources, gas sources and substrate manipulators according to customers' requirements. A well-manageable in-situ characterization is obtained by using quartz micro-balance, RHEED systems or quadrupole mass analyzers (QMA).

Outstanding features of the OCTOPLUS-O 400 are the unique dual zone design, high reliability and versatility of the system and its small footprint. These features make our systems particularly suited for applications in research and development – but specific production processes are also covered.

The standard version of the OCTOPLUS-O 400 comprises 12 source ports 4.5 inch (DN63CF) flange size. A rapid pump-down load lock chamber with a horizontal working transfer rod system allows easy substrate introduction without breaking the vacuum of the MBE chamber. We are happy to discuss your MBE system specifications and give competent advice for your application.


Zone 1 (blue coloring):

● Oxide deposition area

● High O2 and O3 partial pressure

● Ozone injector ring close to substrateSchematic Octoplus-O 400

● Short distance of Ozone injector to substrate

● Low Ozone consumption

● Ozone resistant SiC heater

● Strong differential turbo pumping

Zone 2 (yellow coloring):

● Source area

● Low pressure due to small opening towards zone 1

● Separate strong turbo pump

● Pressure significantly lower than in zone 1

● Shutters with low flux transient

● Low efficient individual differential pumping of each source not needed

● Integration of multi-pocket e-beam evaporator possible

No previous NEXT:Compact MBE System-OCTOPLUS 300

CONTACT US

Contact: Nana Zhang

Phone: 18201230727

Tel: 010-80698356

Email: Info@be-instruments.com

Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing