The OCTOPLUS 400 system is a versatile and very thoroughly designed MBE system, ideally suited for III-V, II-VI and other compound semiconductor material applications.The OCTOPLUS 400 system can be easily adapted to small wafer segments as well as to 2, 3 or 4 inch wafers. The field-proven vertical chamber design of the OCTOPLUS 400 plus various state-of-the-art components allow layer by layer precise MBE growth.
Product range and quality of Dr. Eberl MBE-Komponenten GmbH benefit from the many years of active research experience of its team members. We now look back on over 25 years of developing and manufacturing of complex systems and components for multiple tasks in the applied research and production of compound semiconductor materials. Each product is assembled and carefully tested in-house by our MBE experts.
We provide different kinds of effusion cells, valved cracker sources, gas sources and substrate manipulators according to all our customers' requirements. A well-manageable in-situ characterization is obtained by using beam-flux-gauges, RHEED systems or quadrupole mass analyzers (QMA). The proven MBE software EpiSoft controls all shutters, cell- and manipulator temperatures, the chamber pressure and cyropump temperatures. Maximum operation reproducibility and safety is guaranteed.
● application (e.g. III-V, II-VI etc.)
● sample size or wafer size
● additional load-lock or buffer chambers
● wafer transfer system
● number of ports (8 standard, 10 on request)
● effusion cells, valved or gas sources, manipulator
● pumping system (ion getter pumps, cryopumps etc.)
● in-situ characterization tools
● software/hardware control system
● additional requirements
Outstanding features of the OCTOPLUS 400 are the high reliability and versatility of the system and its small footprint. These features make our systems particularly suited for applications in research and development – but specific production processes are also covered.
The standard version of the OCTOPLUS 400 comprises 8 source ports with 4.5 inch (DN 63) flange size. Up to 10 source ports are possible in a custom designed version on request. A rapidly pump-down load lock chamber with a horizontal working transfer rod system allows easy substrate introduction without breaking the vacuum of the MBE chamber.
We are happy to discuss your MBE system specifications and give competent advice for your application.
The OCTOPLUS 400 is in use in leading laboratories. On demand we transmit a detailed list of references. Please contact our sales department for further questions and specification information.
Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing