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Surface Analysis Accessory

  • Ion Sources
  • Ion Sources
Ion SourcesIon Sources

Ion Sources

  • Product description: Ion Sources for Cleaning, Sputtering and Space Simulation Standard sputtering ion sources Scannable fine focus ion sources Electron discharge ion sources Duoplasmatron ion sources Proton sour
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Ion Sources for Cleaning, Sputtering and Space Simulation




Standard sputtering ion sources

Scannable fine focus ion sources

Electron discharge ion sources

Duoplasmatron ion sources

Proton sources

ECR ion source



Standard Sputtering Ion Sources


Ion beam energy up to 5 keV

Argon ion cleaning with adjustable energy and broad beam spot

Computer source control


Scannable Fine Focus Ion Source for sputtering, depth profiling and ISS


Ion beam energy up to 5 keV

Multiple ion species

Focused ion beam with scanning for depth profiling

Computer scanning package

Optional differential pumping for UHV operation

Computer source control

High brightness ion beam

Mass separator optional

Non-line of sight operation available


Scannable Fine Focus Ion Source for sputtering, depth profiling and SIMS


Standard Energy up to 30 keV High intensity, high brightness fine focused ion beam

Multiple ion species

Differential pumping for UHV operation

Optional beam tilt for neutral rejection

Optional fine beam focus for scanning and microprobe operation

High brightness ion beam

Mass separator optional

Non-line of sight operation available


Proton Source for space research


Pure proton beam in an energy range up to 100 keV

Optional magnetic sector mass filtering

Adjustable beam size and homogeneity

Differential pumping for UHV operation

Compact, modular design to be mounted as add-on source to vacuum chambers

Large spot size


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CONTACT US

Contact: Nana Zhang

Phone: 18201230727

Tel: 010-80698356

Email: Info@be-instruments.com

Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing