EUV OEM component

EUV/XUV light source

Turkey system
Automation control
PLC safety control
High uptime
Product description: EUV/XUV light source
INQUIRY

Research Instruments GmbH (RI) is a majority owned subsidiary of Bruker Energy & Supercon Technologies Inc., a subsidiary of Bruker Corporation and was established in 2009. RI has long experience in building and working with Advanced Technologies (UH Vacuum, Ultra-clean, Nano-positioning in Vacuum, EUV sources, optics, and integration Discharges, Analytics, Spectroscopy).

RI's competence in soft-x-ray, XUV & EUV lab solutions is on plasma based radiation sources integrated in systems with ultra-high and ultra-clean vacuum and optical and fine mechanical components.

We not only supply turnkey tools, but also supply EUV related OEM parts, such as, EUV inband distribution CCD camera, EUV spectra monitor, EUV focus unit, EUV energy monitor.

EUV sources mainly includes laser produced plasma sources (LPP) and discharge produced plasma sources (DPP).

Product selection：

EUV Lamp DPP, standard	Xenon or air emission spectra Xe: ≥ 2 W EUV ≥ 150 mW EUV inband ≥ 2000 h operation MTBF 24 / 7 operation
EUV Lamp DPP, power	Xe: ≥ 8 W EUV ≥ 700 mW EUV inband ≥ 500 h operation MTBF Burst (up to 1 hour) permanent operation
EUV LPP, metrology	≥ 5 mW EUV emission gold quasi-continuum spectra < 50 μm source diameter
EUV-Irrad Source, Standard	Xe: ≥ 250 W EUV ≥ 20 W EUV inband or N2 water window (2.4 -4.4 nm) emission
EUV-Irrad Source, Power	Few minute bursts of Xe ≥ 500 W EUV ≥ 40 W EUV inband @ 13.5 nm
EUV-Brightness LPP (concept)	Source size down to 20 μm Inband brightness ≥ 200 W/(mm² sr) Top head high brightness profile