Dual Cluster Source-DCS

Dual Cluster Source is typically used for organic material or for metal evaporation with evaporants like Au, Ag, Bi, Ga, In, etc.

Two independent cells with two 0.6 cc crucibles are tightly arranged on a single DN40CF (O.D. 2.75") flange. This compact design allows assembling two cells in only one single source port and thus increasing the capacity of the MBE system. Effective water cooling provides minimized temperature crosstalk between both cells. It is possible to run one cell e.g. at 1300°C while the other cell keeps its temperature at 150°C.

Technical Data:

Mounting flange: DN40CF (O.D. 2.75")

Dimensions in vacuum Length: standard 220 mm (180-400 mm on request); Diameter: 36mm

Distance source-sample: Typically 100 to 160 mm

Bakeout temperature: 250°C

Temperature sensor Type: K (Chromel/Alumel)/Type C (W5%Re/W26%Re)

Outgassing temperature: 1100°C/1500°C

Operating temperature: 25-1000°C/50-1400°C

Typical power consumption: 500°C @ 7 W / 4 A, 1100°C @ 51 W / 7 A, 1500°C @ 112 W / 10 A

Crucibles: PBN, Quartz, Al2O3, etc.; Nominal charge 600 cc

Cooling: Water cooled block, 30 l/h cooling water flow

Low temperature crosstalk: one cell 1300°C / second cell 150°C possible

Shutters: integrated multi-position rotary shutter (S) or individual rotary shutters (2S)