Electron Beam Evaporator

EBV evaporators are designed for high rate evaporation of low-vapour-pressure materials, especially when high purity of the evaporant is desired. They are frequently used for evaporation of refractory metals, e.g. Mo, Nb, Ta, W, Zr, it is well suited for high-rate evaporation of Al, and of course also for semiconductors like Si and Ge. A typical application of the EBV is SiGe MBE.

Technical Data

Mounting Flange: DN150 CF (O.D. 8"), DN200 CF (O.D. 10") or DN250 CF (O.D. 12")

Filament type: short-legged coil of thick W wire, electron emitting filament

Operating pressure: 1 × 10^-11 mbar ~1 × 10^-5 mbar

Acceleration voltage: 4 - 10 kV

Beam power: max. 10 kW, (3 kW; 5kW; depending on power supply)

Filament current: max. 50 A at 10 V (AC)

Spot size: 5 mm diameter, approx

Primary beam deflection: 270° by permanent magnet system

Dymamic beam deflection: coils wound from KAPTONTM - isolated wire;

x-deflection current: ± 3 A; y-deflection current: ± 3 A;

deflection frequency: max. 150 Hz

Bakeout temperature: 200°C (all air side connectors removed)

Cooling: water cooling, connectors SwagelokTM 8mm (air side); water flow min 8 l/min at 3 bar

Crucibles: 40cm³ or 100cm³ hearth volume

Options: water cooling hood with custom apertures integrated on base flange (K); integrated custom-made source shutter (S) with optional drive unit LSM 40-100; integrated refill unit ERU 16 (R)