Organic Material Effusion Cell-OME

The excellent low temperature properties of the TCC concept make the OME ideally suited for evaporation of temperature sensitive materials like organics, polymers and other high vapor pressure materials from room temperature up to 300°C. As an option, operation even below room temperature is possible by using a chilled cooling liquid.

In ordinary radiation heated (TRC) low temperature cells the evaporant may be locally overheated due to the direct view of the crucible onto the heater wires. In contrast, the crucible of the OME cell never reaches a temperature higher than the actual temperature of the surrounding heater body. Rapid heating up and cooling down rates avoid waste of expensive materials during idling times.

Technical Data:

Heating system : patented TCC technique with encapsulated Ta wire heater

Thermocouple : NiCr/NiAl (type K)

Operating temperature : 15°C-300°C (lowest temperature depending on cooling temperature)

Temperature stability : < ±0.02K (with standard PID controller)

Outgassing temperature : max. 350°C

Bakeout temperature : max. 250°C

Cooling : integrated water cooled heat sink; water flow > 0.5l/min required

Crucibles : 2-35 cm³ (conical shape on request); crucible material: quartz (Q) (others on request)

Options :integrated rotary shutter (S); integrated tight sealing shutter (TS), evacuation tube (E); aperture nozzle (N)