Surface Analysis Accessory

Electron Sources

Product description: These universal use electron sources provide a wide range of beam currents and spot sizes, including but not limited to those shown below. Typical applications include AUGER (AES), Energy Loss Spectro
INQUIRY

These universal use electron sources provide a wide range of beam currents and spot sizes, including but not limited to those shown below. Typical applications include AUGER (AES), Energy Loss Spectroscopy (ELS), X-ray analyses (XPS) and cathodoluminescence studies.

General Purpose Electron Sources

Max. Energy	Max. Beam Current	Model Description
3 keV	20 µA	» ES-380
3 keV	300 µA	» ES-380-HC
5 keV	20 µA	» ES-550
5 keV	300 µA	» ES-550-HC
10 keV	40 µA	» ES-1050
10 keV	200 µA	» ES-1050-HC

Microfocus and Nanofocus Electron Sources

Min. Spot Size	Max. Energy	Model Description
<85 nm	15 keV	» EF-15005
150 nm	12 keV	» EF-1201
250 nm	12 keV	» EF-1202
400 nm	10 keV	» EF-1005
2 µm	8 keV	» EM-802
3 µm	5 keV	» EM-503
6 µm	5 keV	» EM-506

Electron Flood Sources

Max. Energy	Model Description
100 eV	» F01CC
5 keV	» EMF-5
10 keV	» EMF-10
20 keV	» EHF-20
30 keV	» EHF-30
40 keV	» EHF-40
50 keV	» EHF-50
60 keV	» EHF-60
80 keV	» EHF-80
100 keV	» EHF-100

High Beam Power Electron Sources

Max. Energy	Max. Beam Current	Power	Model Description
3 keV	300 µA		» ES-380-HC
5 keV	300 µA		» ES-550-HC
10 keV	200 µA		» ES-1050-HC
20 keV	0.5 mA / 1.0 mA	10 W / 20 W	» EH-20-10 / EH-20-20
30 keV	1.0 mA / 3.3 mA	30 W / 100 W	» EH-30-30 / EH-30-100
40 keV	0.5 mA / 1.0 mA	20 W / 40 W	» EH-40-20 / EH-40-40
50 keV	0.5 mA / 1.0 mA	25 W / 50 W	» EH-50-25 / EH-50-50
60 keV	0.5 mA / 1.0 mA	30 W / 60 W	» EH-60-30 / EH-60-60
80 keV	0.5 mA / 1.0 mA	40 W / 80 W	» EH-80-40 / EH-80-80
100 keV	0.5 mA / 1.0 mA	50 W / 100 W	» EH-100-50 / EH-100-100

High Energy Small Focus Electron Sources

Max. Energy	Spot Size	Model Description
20 keV	<150 µm	» EH-20
30 keV	<150 µm	» EH-30
40 keV	<150 µm	» EH-40
50 keV	<150 µm	» EH-50
60 keV	<150 µm	» EH-60
80 keV	<150 µm	» EH-80
100 keV	<150 µm	» EH-100
60 keV	50 µm	» GDS 60 (for GED applications)

Low Energy Electron Sources

Max. Energy	Max. Beam Current	Special features	Model Description
100 eV	100 µA		» NEK-150
100 eV	100 µA	scannable	» NEK-150-SC
100 eV	20 µA	for charge compensation	» F01CC

Electron Sources for RHEED

Max. Energy	Model Description
12 keV	» RHEED-12
15 keV	» RHEED-15
20 keV	» RHEED-20
30 keV	» RHEED-30
35 keV	» RHEED-35
40 keV	» RHEED-40
50 keV	» RHEED-50
60 keV	» RHEED-60