The wafer heaters or heated stations - WH - are suited for all substrate heating applications where the full functionality of a substrate manipulator is not required. For some applications, for example, one can renounce the rotation and/or the linear travel of the substrate. In that case Dr. Eberl MBE Komponenten can offer a wide range of different wafer heaters.
Technical Data:
Heater type : W wire or Ta wire, or SiC, graphite heater (S)
Wafer temperature : max. 1200°C
Contact: Nana Zhang
Phone: 18201230727
Tel: 010-80698356
Email: Info@be-instruments.com
Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing